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當(dāng)前位置:首頁  /  技術(shù)文章  /  日本ORC紫外線照度計(jì):精密測(cè)量光固化與曝光工藝的關(guān)鍵技術(shù)

日本ORC紫外線照度計(jì):精密測(cè)量光固化與曝光工藝的關(guān)鍵技術(shù)

更新時(shí)間:2025-09-20點(diǎn)擊次數(shù):127

在光固化、半導(dǎo)體制造和印刷電路板曝光等精密工業(yè)領(lǐng)域,對(duì)紫外線強(qiáng)度的精確測(cè)量與控制直接關(guān)系到產(chǎn)品質(zhì)量與工藝穩(wěn)定性。日本ORC(Oak Ridge Corporation)作為紫外線測(cè)量技術(shù)領(lǐng)域的企業(yè),其生產(chǎn)的紫外線照度計(jì)和能量計(jì)為行業(yè)提供了精準(zhǔn)可靠的測(cè)量解決方案。

在光固化、半導(dǎo)體制造和印刷電路板曝光等精密工業(yè)領(lǐng)域,對(duì)紫外線強(qiáng)度的精確測(cè)量與控制直接關(guān)系到產(chǎn)品質(zhì)量與工藝穩(wěn)定性。日本ORC(Oak Ridge Corporation)作為紫外線測(cè)量技術(shù)領(lǐng)域的企業(yè),其生產(chǎn)的紫外線照度計(jì)和能量計(jì)為行業(yè)提供了精準(zhǔn)可靠的測(cè)量解決方案。

本文將深入探討ORC紫外線測(cè)量儀器的技術(shù)特點(diǎn)、工作原理及其在不同工業(yè)場景中的應(yīng)用。

1. ORC紫外線照度計(jì)的核心技術(shù)特點(diǎn)

ORC紫外線照度計(jì)集成了多項(xiàng)精密測(cè)量技術(shù),能夠滿足各種苛刻工業(yè)環(huán)境下的測(cè)量需求。

高精度測(cè)量能力:ORC照度計(jì)具備高的測(cè)量精度和重復(fù)性。例如UV-351型號(hào)的對(duì)準(zhǔn)精度在自身紫外線標(biāo)準(zhǔn)的±1.5%范圍內(nèi),重復(fù)性也達(dá)到±1.5%以內(nèi)。這種精度確保了工藝過程的高度一致性。

多波長支持與傳感器兼容性:ORC提供了多種傳感器型號(hào),覆蓋不同波長范圍:

  • UV-25型:敏感波長241-271nm,峰值254nm

  • UV-35型:敏感波長310-385nm(或320-390nm),峰值350nm或360nm

  • UV-42型:敏感波長330-490nm,峰值420nm

智能功能與數(shù)據(jù)輸出:新型號(hào)如UV-M03A配備了自動(dòng)量程功能,可以輕松測(cè)量紫外線照度和光強(qiáng)度。多數(shù)ORC照度計(jì)還配備了RS-232C通信接口,可將測(cè)量數(shù)據(jù)傳輸?shù)絇C進(jìn)行進(jìn)一步分析和記錄。部分型號(hào)還具有自動(dòng)關(guān)機(jī)功能、設(shè)定記憶功能和自動(dòng)開機(jī)功能。

堅(jiān)固設(shè)計(jì)與便攜性:ORC照度計(jì)采用堅(jiān)固的金屬機(jī)身設(shè)計(jì),具有高耐熱性,工作溫度范圍通常為0-50℃或0-60℃。同時(shí),它們大多采用小型輕量化設(shè)計(jì),如UV-M03A主機(jī)尺寸僅為71(W)×151(D)×29(H)mm,重量160克,便于現(xiàn)場使用和攜帶。

2. ORC紫外線照度計(jì)的工作原理

ORC紫外線照度計(jì)基于光電轉(zhuǎn)換原理工作,其核心組件是光敏二極管傳感器。當(dāng)紫外線照射到傳感器時(shí),會(huì)產(chǎn)生與光強(qiáng)成正比的電信號(hào)。儀器內(nèi)部電路對(duì)這個(gè)信號(hào)進(jìn)行放大和處理,計(jì)算出照度值(mW/cm2)和累計(jì)光量值(mJ/cm2)。

傳感器前端的光學(xué)濾鏡確保只有特定波段的紫外線能夠到達(dá)傳感器,從而保證測(cè)量的準(zhǔn)確性和特異性。儀器內(nèi)部的微處理器負(fù)責(zé)信號(hào)處理、單位轉(zhuǎn)換和顯示控制,并通過接口實(shí)現(xiàn)數(shù)據(jù)輸出和設(shè)備控制。

3. 主要型號(hào)及其技術(shù)參數(shù)

ORC提供了多種型號(hào)的紫外線照度計(jì),以滿足不同應(yīng)用場景的需求。以下是幾款主要型號(hào)的技術(shù)特點(diǎn):


UV-M03AUV-351UV-M06UV-M10-P
測(cè)量照度范圍0.001-50mW/cm20.1-100.0mW/cm20.000-100.0mW/cm2多種光強(qiáng)度設(shè)置
測(cè)量光量范圍0.001-19999mJ/cm21-19999mJ/cm20.1-19999mJ/cm2照度與時(shí)間測(cè)量
峰值靈敏度350nm360nm170nm可配多種接收器
特殊功能自動(dòng)量程,RS-232C輸出一體式設(shè)計(jì),溫度測(cè)量準(zhǔn)分子光線測(cè)量控制信號(hào)輸出,定時(shí)功能
應(yīng)用領(lǐng)域通用UV測(cè)量光固化,印刷機(jī)械準(zhǔn)分子光源監(jiān)測(cè)UV照射設(shè)備控制

4. 應(yīng)用領(lǐng)域

ORC紫外線照度計(jì)在多個(gè)工業(yè)領(lǐng)域發(fā)揮著關(guān)鍵作用:

半導(dǎo)體和液晶制造:在這些領(lǐng)域,ORC照度計(jì)用于監(jiān)控曝光設(shè)備的光強(qiáng),確保光刻工藝的精確性和一致性。SD型傳感器(如UV-SD25、UV-SD35、UV-SD42)專門為這些應(yīng)用設(shè)計(jì),確保與現(xiàn)有測(cè)量設(shè)備的數(shù)據(jù)兼容性。

電子電路板制造:在印刷電路板(PCB)制造過程中,ORC照度計(jì)用于管理曝光工藝。對(duì)此類應(yīng)用,推薦使用SN型傳感器(如UV-SN25、UV-SN35、UV-SN42)。

紫外線固化工藝:ORC紫外線照度計(jì)廣泛應(yīng)用于各種UV固化過程,如印刷、涂料和粘合劑固化。UV-351型號(hào)特別適用于印刷機(jī)械上的光固化應(yīng)用,確保印刷及干燥過程達(dá)到理想的質(zhì)量控制。

殺菌消毒應(yīng)用:用于測(cè)量紫外線殺菌設(shè)備的照射強(qiáng)度與劑量,確保殺菌效果。

學(xué)術(shù)與研究:在各種需要精確測(cè)量紫外線強(qiáng)度和能量的科學(xué)研究中發(fā)揮作用。

5. 選型與使用建議

選擇合適的ORC紫外線照度計(jì)時(shí),需要考慮以下因素:

波長匹配:根據(jù)您的應(yīng)用場景選擇中心波長匹配的探頭。用365nm的探頭去測(cè)254nm的光源,得到的將是錯(cuò)誤的數(shù)據(jù)。

傳感器類型選擇:對(duì)于半導(dǎo)體和液晶基板制造過程,推薦使用SD型傳感器;對(duì)于電子電路板制造過程,則推薦使用SN型傳感器。

測(cè)量范圍:根據(jù)待測(cè)光源的強(qiáng)度選擇合適的測(cè)量范圍。如果強(qiáng)度未知,建議選擇具有自動(dòng)量程功能的型號(hào)。

環(huán)境條件:考慮工作環(huán)境的溫度、濕度等因素,確保所選型號(hào)能在該環(huán)境下穩(wěn)定工作。

使用ORC紫外線照度計(jì)時(shí),還需注意以下事項(xiàng):

  • 定期校準(zhǔn):為保證測(cè)量精度,建議定期將整套設(shè)備送至或認(rèn)可的計(jì)量機(jī)構(gòu)進(jìn)行校準(zhǔn)

  • 避免過熱:雖然探頭設(shè)計(jì)用于耐受一定高溫,但仍需注意探頭標(biāo)稱的溫度上限

  • 保持清潔:探頭前部的濾鏡窗口需保持清潔,避免污漬、指紋影響透光性和測(cè)量結(jié)果

  • 正確解讀數(shù)據(jù):理解照度(mW/cm2,強(qiáng)度) 和累計(jì)光量(mJ/cm2,能量/劑量) 的區(qū)別

6. 結(jié)論

日本ORC紫外線照度計(jì)憑借其高精度測(cè)量能力多波長支持堅(jiān)固便攜的設(shè)計(jì)以及智能化的功能,成為光固化、半導(dǎo)體制造和電子電路板生產(chǎn)等領(lǐng)域中的測(cè)量工具。

通過選擇合適的型號(hào)并正確使用,企業(yè)能夠有效監(jiān)控和控制紫外線工藝過程,提高產(chǎn)品質(zhì)量和生產(chǎn)效率。隨著紫外線技術(shù)的不斷發(fā)展,ORC也在持續(xù)創(chuàng)新其產(chǎn)品線,如2025年新推出的UV-M10-P型號(hào),配備了控制信號(hào)輸出功能,進(jìn)一步拓展了紫外線測(cè)量的應(yīng)用范圍


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